|< BK21 플러스 BEST 정보기술 사업단 세미나 개최 안내 >
개최일시 : 2017년 08월 28일 월요일 15:00 ~ 16:00
개최장소 : 제 2공학관 B037호
세미나 제목 : Nanoscale Surface Engineering for Advanced Nanoelectronics: Thin Film Process & Engineering in Nanofabrication
Surface engineering is a sub-discipline of materials science and engineering that deals with the surface of solid matter. Historically, the surface engineering involves altering properties of the solid-state surface, which interacts with surrounding environment, in order to reduce the surface degradation over time. Conventionally, from tribological point of view, the surface engineering has received a great deal of attention, especially for wear/friction/corrosion/fatigue-protection coating technologies in automotive and aerospace industries, pursuing improved hardness and thermal stability with sufficiently good adhesion.
Meanwhile, we are already living in a nano-era (i.e. length scale of approximately 1 - 100 nanometer range) that requires nanoscale surface engineering. In the modern nanotechnologies, accordingly, the advanced nano-surface engineering basically aims to provide additional functionality, such as mechanical, electrical, magnetic, and optical characteristics, to the solid surface, not found naturally in the original solid surface. It can be enabled through surface modification/functionalization, where a material surface itself can be transformed or through surface coating technologies, where additional structures and compositions can be added.
In this seminar, therefore, we focus on recent trends in the advanced nanoscale surface engineering implemented for modern nanoelectronics. As Si-based technology node nears ~10 nm and approaches its physical limit, alternative surface engineering techniques based on atomic layer deposition (ALD) and atomic layer etching (ALE), are extremely required for further extension of Moore’s law, together with structural challenges of integration-feasible 3D nanostructures such as 3D FinFETs and nanowires (NWs) in place of the conventional planar MOSFET. In addition, extremely fine-feature patterning is also required to satisfy the increasing process complexity of modern electronic devices beyond the sub-10 nm technology regime. Therefore, we further explore nanoscale bottom-up hybrid nanofabrication methods, based on various self-assembled nanopatterning processes using nanotemplates and area-selective ALD.
강연자 성함&직함 / 소속 : 김우희 박사/Micron Technology